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Pixel detectors in SOI technology for FEL- and synchrotron-applications

The SOI-detector.

SOI detector technology is an non-standard technology developed among others by the research institute KEK and the chip-foundry Lapis-Semiconductor (formerly OKI). SOI-detector technology allows the implementation of CMOS electronics on the high-quality and high-ohmic SOI substrate (for instance a 500 micrometer thick floating-zone 7 kOhm cm substrate). The sensor diodes are implemented in the bulk underneath the buried oxide. The connections through the buried oxide are made to connect the readout electronics with the sensor diodes.

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